Non-destructive thickness determination of thin cobalt and cobalt disilicide layers on silicon substrates
- 15 March 1994
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 240 (1-2) , 110-113
- https://doi.org/10.1016/0040-6090(94)90705-6
Abstract
No abstract availableKeywords
This publication has 2 references indexed in Scilit:
- Characterization by spectroscopic ellipsometry of buried layer structures in silicon formed by ion beam synthesisMaterials Science and Engineering: B, 1992
- Algorithms for the rapid simulation of Rutherford backscattering spectraNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1985