Ion beam smoothing of CVD diamond thin films by etchback method
- 1 January 1997
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
- Vol. 121 (1-4) , 191-194
- https://doi.org/10.1016/s0168-583x(96)00545-9
Abstract
No abstract availableThis publication has 4 references indexed in Scilit:
- Study on the polishing of chemically vapour deposited diamond filmThin Solid Films, 1992
- Smoothing of chemically vapour deposited diamond films by ion beam irradiationThin Solid Films, 1992
- Processing of CVD diamond films by YAG laser.Journal of the Japan Society for Precision Engineering, 1990
- Vapor Deposition of Diamond Particles from MethaneJapanese Journal of Applied Physics, 1982