Formation of cBN films by arc-like plasma enhanced ion plating method.

• 1 January 1988
• journal article
• Published by The Vacuum Society of Japan in SHINKU
• Vol. 31  (12) , 968-976
• https://doi.org/10.3131/jvsj.31.968

Abstract

Keywords

• CBN FILMS
• ION PLATING
• LIKE PLASMA
• ARC LIKE
• PLATING METHOD
• PLASMA ENHANCED