Dislocation density and sheet resistance variations across semi-insulating GaAs wafers
- 1 July 1982
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Transactions on Electron Devices
- Vol. 29 (7) , 1039-1045
- https://doi.org/10.1109/t-ed.1982.20831
Abstract
Dislocation densities and sheet resistances have been measured acrossKeywords
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