Elastic Modulus of Amorphous Carbon Films
- 16 October 1994
- journal article
- thin film-properties
- Published by Wiley in Physica Status Solidi (a)
- Vol. 145 (2) , 385-392
- https://doi.org/10.1002/pssa.2211450219
Abstract
No abstract availableKeywords
This publication has 19 references indexed in Scilit:
- Characterization of thin diamond-like carbon films by ultrasonic surface wavesDiamond and Related Materials, 1993
- Hardness and elastic modulus of diamond and diamond-like carbon filmsThin Solid Films, 1993
- Deposition mechanisms for promoting sp3 bonding in diamond-like carbonDiamond and Related Materials, 1993
- Determination of elastic modulus and thickness of surface layers by ultrasonic surface wavesThin Solid Films, 1992
- Properties of tetrahedral amorphous carbon prepared by vacuum arc depositionDiamond and Related Materials, 1991
- Biaxial modulus measurement of chemical vapor deposited polycrystalline diamond filmsJournal of Vacuum Science & Technology A, 1991
- Internal stress and elasticity of synthetic diamond filmsApplied Physics Letters, 1990
- Coating technology based on the vacuum arc-a reviewIEEE Transactions on Plasma Science, 1990
- Film deposition by laser-induced vacuum arc evaporationIEEE Transactions on Plasma Science, 1990
- Study of attenuation and dispersion of optically excited surface acoustic waves employing small poly(vinylidene difluoride) foil transducersMaterials Science and Engineering: A, 1989