Dynamical model of microscale electromechanical spatial light modulator
- 1 June 1993
- journal article
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 73 (11) , 7120-7124
- https://doi.org/10.1063/1.352381
Abstract
A model based on classical physics describing the nonlinear dynamics of a microscale spatial light modulator has been developed. The coupled electromechanical equations of motion have been solved for steady-state, transient, and harmonic excitation. Comparison of theoretical predictions with the results of experiment for representative devices shows good agreement for small-amplitude deflections, large-amplitude deflections, and unstable transitions.This publication has 3 references indexed in Scilit:
- Characterization of a micromechanical spatial light modulatorJournal of Applied Physics, 1993
- Calibration of scanning tunneling microscope transducers using optical beam deflectionApplied Physics Letters, 1989
- 128 × 128 deformable mirror deviceIEEE Transactions on Electron Devices, 1983