Vertically structured silicon membrane by electrochemical etching

• 30 April 1990
• journal article
• Published by Elsevier in Sensors and Actuators A: Physical
• Vol. 23  (1-3) , 899-903
• https://doi.org/10.1016/0924-4247(90)87055-n

Abstract

Keywords

• CRYSTAL
• ELECTROCHEMICAL ETCHING
• STOP
• IMPLANTATION
• CONTOURS
• STRUCTURED
• THICK
• RIMS