Quantitative electron probe microanalysis using Gaussian ϕ(ρz) Curves

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Abstract
The Gaussian expression for ϕ(ρz) has been used as the basis of a computer program for quantitative electron probe microanalysis. Corrections for absorption and atomic number are combined within the expression for ϕ(ρz) whereas the fluorescence correction is based on numerical integration over the primary and secondary intensities. Error histograms based on about 500 published analyses of standard specimens have been used to adjust the parameters in the Gaussian expression for optimum accuracy. The resultant error histograms are as narrow as those obtained for the most accurate of the current ZAF correction procedures. Extension of the method to non‐normal electron incidence is relatively straightforward.