Lateral diffusion of photodoped silver in amorphous Ge25 Se75 layers
- 16 March 1984
- journal article
- research article
- Published by Wiley in Physica Status Solidi (a)
- Vol. 82 (1) , 157-161
- https://doi.org/10.1002/pssa.2210820119
Abstract
No abstract availableKeywords
This publication has 6 references indexed in Scilit:
- Diffusion of silver associated with photodoping into amorphous chalcogenidesJournal of Non-Crystalline Solids, 1982
- Submicron optical lithography using an inorganic resist/polymer bilevel schemeJournal of Vacuum Science and Technology, 1980
- Bilevel high resolution photolithographic technique for use with wafers with stepped and/or reflecting surfacesJournal of Vacuum Science and Technology, 1979
- Photostimulated solid state reactionsContemporary Physics, 1978
- A new inorganic electron resist of high contrastApplied Physics Letters, 1977
- A novel inorganic photoresist utilizing Ag photodoping in Se-Ge glass filmsApplied Physics Letters, 1976