The plasma deposited a-Si: H p-i-n/ITO heteroface solar cell on flexible organic polymer substrate has been studied on the photovoltaic properties and their dependence on the deposition temperature and surface morphology of a-Si: H layer. So far, the conversion efficiency of 6.36% was obtained for the cells on the polymer film substrate by utilizing microcrystalline n-layer instead of amorphous n-layer. This figure is a little lower than that of cells on stainless steel plate and is partly attributed to the larger surface roughness of a-Si: H on organic polymer film.