Bimorph-driven x–y–z translation stage for scanned image microscopy

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Abstract
We have developed an x–y–z scanning stage for mechanically scanned microscopy. The stage is constructed of ‘‘double‐S’’ mode piezoelectric bimorphs. The prototype unit has a deflection sensitivity of 0.3 μm/V and a travel in each of the three axes of ±60 μm. The lowest mechanical resonances of the stage are at 190, 220, and 360 Hz, corresponding to the x, y, and z axes of the stage, respectively. The noise level of the stage, when mounted on an isolation table, is ∼0.1 nm. The performance of the stage can be understood in terms of a simple lumped element model which can be used to optimize such stages for particular applications.

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