Measurement of static friction in mechanical couplings of articulated microrobots

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Abstract
Force measurements from 3D polysilicon mechanisms under various loading conditions are presented. Force was measured using the deflection of polysilicon spring gauges with known dimensions and estimated elastic properties. Force measurements were made to determine the force required to overcome static friction when rotating hinged structures with and without external loading using a sliding mechanism. Both loaded and unloaded mechanisms display a wide statistical variation in friction force. Unloaded mechanisms require on average 1-5 (mu) N of force to move, whereas mechanisms manipulating 3.5 (mu) N loads require on average 1-10 (mu) N of force. These measurements are motivated by an effort to produce articulated microrobots, and progress in this area is also discussed.

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