New micro stereo lithography for freely movable 3D micro structure-super IH process with submicron resolution
- 27 November 2002
- conference paper
- Published by Institute of Electrical and Electronics Engineers (IEEE)
Abstract
No abstract availableThis publication has 4 references indexed in Scilit:
- Real three dimensional micro fabrication using stereo lithography and metal moldingPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2002
- Development of mass productive micro stereo lithography (Mass-IH process)Published by Institute of Electrical and Electronics Engineers (IEEE) ,2002
- Three dimensional micro integrated fluid systems (MIFS) fabricated by stereo lithographyPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2002
- Biochemical IC chip toward cell free DNA protein synthesisPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2002