Excimer laser as a manufacturing tool

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Abstract
In general, laser material processing is carried out using CO2 and YAG systems. This work typically covers welding, cladding and cutting to produce such unlikely products as juice cans and razor blades. Excimer lasers are fast becoming the next most popular processing machine. They are especially suited for the removal of thermally sensitive materials with minimal heat damage and production of micron sized features. Beginning with what can be achieved in various materials this paper will step through the main requirements in developing a fully operational excimer laser process. This should reflect an efficient beam delivery design, high quality aperture masks and specialized part handling equipment. This paper will also address aspects of motion control, vibration isolation and specialized vision systems.

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