Multilayer roughness evaluated by X-ray reflectivity

• 1 April 1988
• journal article
• Published by International Union of Crystallography (IUCr) in Journal of Applied Crystallography
• Vol. 21  (2) , 136-144
• https://doi.org/10.1107/s0021889887010434

Abstract

Keywords

• MODEL
• EXPERIMENTAL
• ROUGHNESS
• MULTILAYER STRUCTURES
• DEFECT
• THEORY
• SUBSTRATE
• REFLECTIVITY