Field oxide microbridges, cantilever beams, coils and suspended membranes in SACMOS technology
- 1 April 1990
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 23 (1-3) , 1019-1022
- https://doi.org/10.1016/0924-4247(90)87081-s
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- A new approach for the fabrication of micromechanical structuresSensors and Actuators, 1989
- Polycrystalline Silicon Micromechanical BeamsJournal of the Electrochemical Society, 1983
- Silicon as a mechanical materialProceedings of the IEEE, 1982