Micromachined solenoids for highly sensitive magnetic sensors
- 9 December 2002
- conference paper
- Published by Institute of Electrical and Electronics Engineers (IEEE)
- p. 1077-1080
- https://doi.org/10.1109/sensor.1991.149084
Abstract
Micromachined solenoids on silicon wafer for highly sensitive vector magnetic field sensors have been proposed. The feature of the solenoids is that the magnetic field is parallel to the wafer surface. In order to realize interconnections on three-dimensional structure, direct electron beam lithography was utilized. The formation of Mo interconnections was achieved on the surface of deep U-shaped grooves. Applications of the solenoids are also discussed.<>Keywords
This publication has 3 references indexed in Scilit:
- Fluxgate sensor in planar microtechnologySensors and Actuators A: Physical, 1990
- Planar inductorIEEE Transactions on Magnetics, 1984
- The fluxgate magnetometerJournal of Physics E: Scientific Instruments, 1979