Second harmonic generation and atomic-force microscopy studies of porous silicon
- 28 August 1995
- journal article
- research article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 67 (9) , 1191-1193
- https://doi.org/10.1063/1.115003
Abstract
Structural properties of porous silicon were studied with atomic-force microscopy (AFM) and optical second harmonic generation (SHG). Depending on etching conditions, the SHG response was observed to be either anisotropic, showing C2v symmetry, or isotropic. This correlated with AFM observations of quasi ordered structures in the first case. The Si etching process was studied by in situ SHG measurements.Keywords
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