Contactless Photothermal Ionization Spectroscopy of Shallow Defects in Semiconductors

• 1 October 1993
• journal article
• Published by Trans Tech Publications, Ltd. in Materials Science Forum
• Vol. 143-147, 1365-1370
• https://doi.org/10.4028/www.scientific.net/msf.143-147.1365

Abstract

Keywords

• PTIS
• SHALLOW DEFECTS