ON THE NUMBER OF ATOMS DISPLACED BY IMPLANTED IONS OR ENERGETIC RECOIL ATOMS
- 1 February 1969
- journal article
- research article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 14 (3) , 114-117
- https://doi.org/10.1063/1.1652730
Abstract
The validity of the Kinchin‐Pease formula is re‐examined on the basis of recent progress in the theory of collision cascades and irradiation experiments on semiconductors and metals.Keywords
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