Electron back-scattering patterns—A new technique for obtaining crystallographic information in the scanning electron microscope
- 1 May 1973
- journal article
- research article
- Published by Taylor & Francis in Philosophical Magazine
- Vol. 27 (5) , 1193-1200
- https://doi.org/10.1080/14786437308225827
Abstract
It is shown that the angular distribution of back-scattered electrons can be observed in a scanning electron microscope, and that the patterns observed can be used to obtain crystallographic information about the specimen. The patterns are termed electron back-scattering patterns (E.B.S.P.). The use of these patterns as a crystallographic techniques is shown to have several significant advantages over two other techniques currently in use in scanning electron microscopes.Keywords
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