High Q, Temperature Stable ZnO-On-SILICON SAW RESONATORS

• 1 January 1980
• proceedings article
• Published by Institute of Electrical and Electronics Engineers (IEEE)
• p. 113-117
• https://doi.org/10.1109/ultsym.1980.197370

Abstract

Keywords

• TEMPERATURE
• SURFACE ACOUSTIC WAVES
• GOLD
• CHROMIUM
• ZINC OXIDE
• ALUMINUM
• ETCHING
• OPTICAL FILMS
• INSERTION LOSS
• STRIPS