Modeling optical microscope images of integrated-circuit structures
- 1 May 1991
- journal article
- Published by Optica Publishing Group in Journal of the Optical Society of America A
- Vol. 8 (5) , 778-790
- https://doi.org/10.1364/josaa.8.000778
Abstract
Optics InfoBase is the Optical Society's online library for flagship journals, partnered and copublished journals, and recent proceedings from OSA conferences.Keywords
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