Electron beam induced selective etching and deposition technology

• 1 September 1989
• journal article
• Published by American Vacuum Society in Journal of Vacuum Science & Technology B
• Vol. 7  (5) , 1182-1190
• https://doi.org/10.1116/1.584570

Abstract

Keywords

• ELECTRON BEAM
• BEAM INDUCED
• DEPOSITION TECHNOLOGY
• SELECTIVE ETCHING
• INDUCED SELECTIVE