Fine tuning of surface-acoustic-wave resonator filters with metallisation thickness

Publisher Website
Google Scholar
Abstract
Two-port surface-acoustic-wave resonator filters with Q factors in excess of 3000 and a sidelobe suppression of 30 dB have been fabricated from yz LiNbO3 with aluminium metallisation. The dispersion of the centre frequency with aluminium thickness has been found to be 70∓10 kHz/μm at 35 MHz. The ability to fine tune with metal thickness has been used to compensate inherent substrate inhomogeneities and to fabricate a high-Q factor flat-top filter.