Optical behavior of textured silicon
- 15 February 1994
- journal article
- research article
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 75 (4) , 2202-2209
- https://doi.org/10.1063/1.356282
Abstract
The optical behavior of polycrystalline SILSO silicon wafers with a mechanically V‐grooved surface has been studied between 300 and 1500 nm. The texturization was carried out by a conventional dicing saw using beveled blades. For a 35° V‐grooved surface and a nonmetallized backside the optical path length in the weakly absorbing part of the spectrum (1100–1200 nm) was found to be enhanced by a factor of 33 as compared to a nongrooved wafer. The enhanced reflectance in the nonabsorbing spectral region for the former is analyzed and explained. The different loss contributions due to a nonideal grooved structure are discussed.This publication has 11 references indexed in Scilit:
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