Ion‐Beam Etching of InP and Its Application to the Fabrication of High Radiance InGaAsP / InP Light Emitting Diodes
- 1 October 1984
- journal article
- Published by The Electrochemical Society in Journal of the Electrochemical Society
- Vol. 131 (10) , 2373-2380
- https://doi.org/10.1149/1.2115261
Abstract
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