Diffusion of Ion-Implanted Group III and V Impurities in SlO2

• 1 January 1991
• journal article
• Published by Trans Tech Publications, Ltd. in Solid State Phenomena
• Vol. 1-2, 133-152
• https://doi.org/10.4028/www.scientific.net/ssp.1-2.133

Abstract

Keywords

• ION IMPLANTATION