Silicon-on-Insulator CWDM Power Monitor/Receiver With Integrated Thin-Film InGaAs Photodetectors

Abstract
In this letter, we demonstrate a compact and cost-effective four-channel demultiplexer with integrated photodetectors for application in coarse wavelength-division-multiplexing systems. The device consists of a silicon-on-insulator planar concave grating (PCG) demultiplexer and heterogeneously integrated InAlAs-InGaAs metal-semiconductor-metal photodetectors, and has a footprint of only 0.1 mm2 . The PCG and integrated photodetectors have a responsivity of 0.6 A/W for TE-polarized light. The integrated device has an optical crosstalk of -25 dB.