Epitaxial Silicon-Germanium Alloy Films on Silicon Substrates

• 1 January 1962
• journal article
• Published by The Electrochemical Society in Journal of the Electrochemical Society
• Vol. 109  (1) , 70
• https://doi.org/10.1149/1.2425335

Abstract

Keywords

• EPITAXIAL SILICON
• SILICON GERMANIUM
• ALLOY FILMS
• GERMANIUM ALLOY
• SILICON SUBSTRATES