Studies of texture in thin films using synchrotron radiation and energy dispersive diffraction
- 6 April 1987
- journal article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 50 (14) , 897-899
- https://doi.org/10.1063/1.98026
Abstract
High resolution, energy dispersive patterns are obtained with parallel beam x-ray optics, synchrotron radiation, a step scanning incident beam channel monochromator, and independently selectable specimen and detector angles, which are fixed during the scan. This permits decoupling of the specimen and detector geometry (which would cause defocusing in conventional methods) and makes it possible to measure the intensities at several incidence angles to determine the preferred orientation of the crystallites in a thin film. The method is illustrated by patterns of a Pd/Xe thin film.Keywords
This publication has 2 references indexed in Scilit:
- Effect of energetic neutralized noble gas ions on the structure of ion beam sputtered thin metal filmsJournal of Vacuum Science & Technology A, 1987
- Parallel Beam Powder Diffractometry Using Synchrotron RadiationMaterials Science Forum, 1986