Integrated safety system for MOCVD laboratory

• 1 September 1986
• journal article
• Published by Elsevier in Journal of Crystal Growth
• Vol. 77  (1-3) , 95-100
• https://doi.org/10.1016/0022-0248(86)90288-5

Abstract

Keywords

• MOCVD LABORATORY
• INTEGRATED SAFETY SYSTEM
• SYSTEM FOR MOCVD