High-spectral-purity and high-durability kHz KrF excimer laser with advanced rf preionization discharge
- 29 June 1998
- proceedings article
- Published by SPIE-Intl Soc Optical Eng
- p. 1031-1040
- https://doi.org/10.1117/12.310733
Abstract
We present the performance and durability of the newest model of the KrF excimer laser for microlithography KLES-G10K. The laser achieves 10 W of output power with 0.7 pm bandwidth at 1000 Hz with newly developed solid state pulsed power module and the high precise narrowing module. The durability of laser tube achieves 5 billion pulses with the new radio frequency preionization scheme, which reduces consumption of fluorine gas and maintenance of laser tube drastically.Keywords
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