The practical use and application of Monte-Carlo studies in physical vapour deposition technology
- 10 December 1991
- journal article
- Published by Elsevier in Surface and Coatings Technology
- Vol. 49 (1-3) , 132-138
- https://doi.org/10.1016/0257-8972(91)90044-w
Abstract
No abstract availableThis publication has 1 reference indexed in Scilit:
- Monte Carlo simulation of the particle transport process in sputter depositionThin Solid Films, 1984