Composition and Structure of Sputtered Films of Ferroelectric Niobates

Publisher Website
Google Scholar
Abstract
Thin films of several niobate materials have been deposited by dc sputtering onto gold-plated fused-quartz substrates at temperatures up to 600 °C. The sputtering targets were pressed disks made in some cases from the pre-reacted ferroelectric niobate powder and in other cases from a mixture of the appropriate reactants. The structure of the resulting films was examined by x-ray diffraction and the composition by electron microprobe analysis. At sufficiently high substrate temperatures the films all showed well-defined crystal structures, although many of them were nonstoichiometric, being rich in Nb2O5. The loss of the more volatile components was in some cases compensated by increasing the percentage of these components in the target. Some of the films showed piezoelectric activity, but the effective piezoelectric coupling was very low.

This publication has 0 references indexed in Scilit: