Mass Dependence of Critical Amorphizing Dose in Ion Implantation

• 1 July 1972
• journal article
• Published by IOP Publishing in Japanese Journal of Applied Physics
• Vol. 11  (7) , 1062-1063
• https://doi.org/10.1143/jjap.11.1062

Abstract

Keywords

• MASS DEPENDENCE
• ION IMPLANTATION
• DEPENDENCE OF CRITICAL
• DOSE IN ION
• CRITICAL AMORPHIZING DOSE