Prototype micro-valve actuator

4 December 2002

conference paper
Published by Institute of Electrical and Electronics Engineers (IEEE)

p. 40-41
https://doi.org/10.1109/memsys.1990.110244

Abstract

An experimental demonstration of a millimeter-scale actuator using a sputter-deposited film of shape-memory alloy is presented. A membrane of the shape-memory film was prepared, securely held, and then displaced by pneumatic pressure. By applying a low-voltage electrical pulse to cause actuation, the membrane was able to work against the pneumatic load and exhibit two-state behavior.<>

Keywords

PROTOTYPES
MICROVALVES
ACTUATORS
BIOMEMBRANES
SHAPE MEMORY ALLOYS
TEMPERATURE DISTRIBUTION
HEAT RECOVERY
CAPACITIVE SENSORS
LOW VOLTAGE
VALVES

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