Outgassing Properties and Microstructures of Ti-N Films.

• 1 January 1991
• journal article
• Published by The Vacuum Society of Japan in SHINKU
• Vol. 34  (4) , 420-426
• https://doi.org/10.3131/jvsj.34.420

Abstract

Keywords

• MICROSTRUCTURES OF TI
• TI N FILMS
• OUTGASSING PROPERTIES AND MICROSTRUCTURES