Summary Abstract: Negative ion kinetics in radio-frequency glow discharges

• 1 May 1986
• journal article
• Published by American Vacuum Society in Journal of Vacuum Science & Technology A
• Vol. 4  (3) , 1795-1796
• https://doi.org/10.1116/1.573940

Abstract

Keywords

• NEGATIVE ION
• SUMMARY ABSTRACT
• ION KINETICS
• FREQUENCY GLOW
• GLOW DISCHARGES
• RADIO