Laser micromachining in the aerospace industry: relevance to biomedical applications

7 July 1993

proceedings article
Published by SPIE-Intl Soc Optical Eng

p. 374-381
https://doi.org/10.1117/12.147679

Abstract

High margin laser micromachining processes were developed lately in the aerospace industry for unique device manufacturing. These processes include precise laser ablation of cuts, grooves and holes in various media (silicon, sapphire, polyamides, etc.) with high aspect ratios (> 120:1) and dimensions close to 1 micrometer, while maintaining the integrity of neighboring integrated circuits. The relevance to biomedical therapeutic and surgical applications and to the interaction of lasers with soft and hard tissues is discussed.

Keywords

AEROSPACE ENGINEERING
LASERS
MICROMACHINING
SAPPHIRE
SILICON
TISSUES
MANUFACTURING
INTEGRATED CIRCUITS
LASER ABLATION

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