Optical and Electrical Properties of SiC Films Prepared in a Microwave Discharge

• 1 January 1968
• journal article
• Published by The Electrochemical Society in Journal of the Electrochemical Society
• Vol. 115  (10) , 1090
• https://doi.org/10.1149/1.2410892

Abstract

Keywords

• OPTICAL AND ELECTRICAL PROPERTIES
• SIC FILMS
• MICROWAVE DISCHARGE
• FILMS PREPARED