Integrated silicon process for microdynamic vacuum field emission cathodes

• 1 November 1993
• journal article
• Published by American Vacuum Society in Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
• Vol. 11  (6) , 2538-2543
• https://doi.org/10.1116/1.586662

Abstract

Keywords

• INTEGRATED SILICON
• EMISSION CATHODES
• VACUUM FIELD
• MICRODYNAMIC VACUUM
• SILICON PROCESS
• FIELD EMISSION