Epitaxial growth of single-crystal (La,Ca)MnO3 thin films

Abstract
Single‐crystal films of perovskitelike (La,Ca)MnO3 with very smooth surface were grown epitaxially on (110) NdGaO3 substrates by a simple facing‐target sputtering technique. Their in‐plane and out‐of‐plane crystal structures were examined by means of a novel double‐crystal x‐ray diffraction technique. The c axis of the samples lay in the film plane. All rocking curves were found to have a full width at half‐maximum of about 0.01° which is smaller than all reported structure data for ceramic thin films.

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