Molybdenum silicide based attenuated phase-shift masks

• 1 November 1994
• journal article
• Published by American Vacuum Society in Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
• Vol. 12  (6) , 3765-3772
• https://doi.org/10.1116/1.587439

Abstract

Keywords

• PHASE SHIFT
• ATTENUATED PHASE
• SHIFT MASKS
• BASED ATTENUATED
• MOLYBDENUM SILICIDE
• SILICIDE BASED