Characterization of ion-implanted gate insulator films for use as ion-selective membrane in ISFETs
- 1 March 1992
- journal article
- Published by Elsevier in Sensors and Actuators B: Chemical
- Vol. 7 (1-3) , 576-579
- https://doi.org/10.1016/0925-4005(92)80367-7
Abstract
No abstract availableKeywords
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