Effects of vacuum annealing on the electronic properties of cleaved GaAs
- 10 October 1983
- journal article
- Published by IOP Publishing in Journal of Physics C: Solid State Physics
- Vol. 16 (28) , 5449-5463
- https://doi.org/10.1088/0022-3719/16/28/013
Abstract
Low-energy electron diffraction, Auger electron spectroscopy and photoemission yield spectroscopy measurements have been performed on GaAs samples cleaved in ultra-high vacuum and subject to in situ isochronous anneals up to 850 degrees C. The properties of the cleaved (110) surface remain unchanged up to about 350 degrees C. Around this temperature, a dissociation occurs inducing a local reconstruction of the surface; at the same time, new states appear which may be attributed to Ga vacancies. Then, around 580 degrees C, the well known dissociation of GaAs sets in with formation of As2, and the Ga-Ga bonds which then form, determine the electronic properties of the sample. Evaporation of arsenic would become dominant around 650 degrees C. Beyond about 780 degrees C, the excess Ga coalesces into Ga-metal droplets and the GaAs substrate undergoes faceting.Keywords
This publication has 29 references indexed in Scilit:
- Preparation and electronic properties of abrupt Ge-GaAs(110) interfacesJournal of Physics C: Solid State Physics, 1982
- Room-temperature formation of the Ag/GaAs (110) interfaceJournal of Physics C: Solid State Physics, 1982
- Electronic properties of Ga/GaAs(110) upon interface formationSurface Science, 1982
- Self-consistent calculations of the electronic structure for ideal Ga and As vacancies in GaAsPhysical Review B, 1981
- Composition and structure of differently prepared GaAs(100) surfaces studied by LEED and AESSurface Science, 1978
- Ge–GaAs(110) interface formationJournal of Vacuum Science and Technology, 1978
- Metal–semiconductor surface and interface states on (110) GaAsJournal of Vacuum Science and Technology, 1978
- Bonding direction and surface-structure orientation on GaAs (001)Journal of Applied Physics, 1976
- Electroreflectance measurements of lattice damage in ion implanted GaAsJournal of Applied Physics, 1976
- GaAs Epitaxy by a Molecular Beam Method: Observations of Surface Structure on the (001) FaceJournal of Applied Physics, 1971