Diffusivity of Moisture in Thin Films
- 1 March 1982
- conference paper
- Published by Institute of Electrical and Electronics Engineers (IEEE)
- No. 07350791,p. 264-267
- https://doi.org/10.1109/irps.1982.361940
Abstract
Absorption of moisture by thin films produces a volume increase which changes the film stress toward compression. This effect is the basis of a new technique for measuring water diffusivity. The diffusion coefficient is determined by a least squares fit of the stress data to the diffusion equation, with appropriate boundary conditions. This technique provides a fast, quantitative supplement to the traditional bias-temperature-humidity stress testing. The differences in diffusivities of common passivations are substantial; phosphosilicate glasses are orders of magnitude higher than plasma nitrides. Diffusivities for several passivation materials are given.Keywords
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