Surface and interface analysis of PVD Al-O-N and γ-Al 2 O 3 diffusion barriers

• 8 September 1999
• journal article
• research article
• Published by Springer Nature in Analytical and Bioanalytical Chemistry
• Vol. 365  (1-3) , 158-162
• https://doi.org/10.1007/s002160051464

Abstract

Keywords

• DIFFUSION BARRIER
• GRAZING INCIDENCE
• REACTIVE MAGNETRON
• AL2O3 FILM
• INTERFACE ANALYSIS