High Vacuum Gas Friction Manometer
- 1 January 1972
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science and Technology
- Vol. 9 (1) , 108-111
- https://doi.org/10.1116/1.1316524
Abstract
A new version of the well-known “spinning rotor pressure gauge,” which was described in 1962 by Beams and co-workers, is presented. The magnetic suspension is now achieved under a permanent magnet by means of a servo current which is applied to the rf sensing coil. The system involves negligible power dissipation. Instead of optical devices inductive pickup coils are used in the horizontal damping system as well as for the determination of the rotor frequency. The whole system thus avoids undesired heat and radiation transfer to the rotor and vacuum chamber. The gas pressure sensitivity is of the order 10−9 Torr.Keywords
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