On the kinetic study of electrochemical vapour deposition

• 18 September 1991
• journal article
• Published by Elsevier in Solid State Ionics
• Vol. 47  (3-4) , 331-336
• https://doi.org/10.1016/0167-2738(91)90256-b

Abstract

Keywords

• FILM THICKNESS
• BEHAVIOR
• TRANSITION
• SUBSTRATES
• STEP
• DEPOSITION TIME
• VAPOUR